摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent a corrosive gas from permeating to the inside of a thermal flowmeter. <P>SOLUTION: The thermal flowmeter has a structure wherein a base is bonded to a body having an auxiliary passage in which a heating resistor and a temperature-sensitive resistor are installed or to a housing molded integrally with the auxiliary passage, an electronic circuit used to control the heating resistor and the temperature-sensitive resistor is installed inside the housing and the housing is covered with a cover. The structure is achieved in such a way that, when the base used to hold the electronic circuit is bonded to the housing, it is bonded by combining an elastic adhesive such as a silicone adhesive or the like and an adhesive of low gas permeability such as a nylon adhesive, an epoxy adhesive, a polyurethane adhesive or the like or a seal member, and that a gas-permeation shielding layer is formed. <P>COPYRIGHT: (C)2003,JPO</p> |