| 摘要 |
PROBLEM TO BE SOLVED: To provide an illumination optical system for a microscope which is capable of forming a light source image having the size and irradiation angle adequate for a pupil position of an objective lens and to provide an illumination optical system for a microscope which is capable of making zonal illumination possible without drastically lowering illumination efficiency. SOLUTION: The illumination optical system for the microscope is arranged with a light source, a collector lens for converting the divergent luminous flux from the light source to approximately parallel luminous fluxes, an intermediate image formation lens 3 for forming a light source image, a projection lens for again forming the image of the luminous flux diverging after forming the light source image through the lens 3 and projecting the light source image to the pupil position of the objective lens, and an annular opening arranged in a position conjugate with the light source. The lens 3 consists of the set of a plurality of sectorial lens surfaces 3c lined up in such a manner that the apex angles thereof attain 360°in total in the rotating direction around one point P. The optical axes O of the respective lens surfaces 3a exist near their vertex angles and are lined up on the circumference around the one point P. COPYRIGHT: (C)2003,JPO
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