METHOD OF MANUFACTURING SENSOR FOR RECOGNIZING SURFACE SHAPE

摘要

PROBLEM TO BE SOLVED: To stably and highly sensitively detect a surface shape in a highly reliable condition without bringing an electrostatic discharge damage caused by a static electricity generated in sensing. SOLUTION: A metal film 110 comprising Ti/TiN is formed on a passivation film 19 including an inside of a through-hole 109a, by a spattering method. Then a resist pattern 111 of a lattice-like shape in top view is formed astride an area on a connection electrode film 108 to arrange an each sensor electrode 107 in the central part of each box therein. The metal film 110 is selectively etched thereafter to be removed by a dry etching method such as reactive ion etching method, for example, using the resist pattern 111 as a mask. COPYRIGHT: (C)2003,JPO