VALVE FOR GAS FLOW RATE CONTROL APPLIANCE

摘要

PROBLEM TO BE SOLVED: To provide a low-cost valve for a gas flow rate control appliance controlled highly precisely. SOLUTION: This valve is provided with a valve element having a valve port communicating with a gas inlet and a gas outlet, a valve member opening/ closing the valve port, a thrust member displacing in the thrust direction, and a housing storing a piezoelectric lamination body driving the thrust member. The thrust member is formed of a polymer material having a linear expansion coefficient of 10×10-5K-1or more, a compression strength 6 MPa or more, and a thermal deformation temperature of 80°C or more. Among these materials are fluoroplastic or silicon resin filled with fiber filler. COPYRIGHT: (C)2003,JPO