| 摘要 |
<p>A vacuum pump control device capable of suppressing a power consumption by a vacuum pump by varying the speed of the vacuum pump according to the operating conditions of a vacuum device, wherein a condition set part (4) sets a relation between the operating conditions of the vacuum device (10) and the rotational speed of the vacuum pump (2) for vacuating the vacuum device (10) to a proper value so that the rotational speed of the vacuum pump (2) does not reach a rotational speed more than that required, a control part (6) inputs external signals such as S1 to Sn in correspondence with the operating conditions of the vacuum device (10), reads the rotating speed of the vacuum pump (2) in correspondence with the external signals from the condition set part (4), and outputs the rotational speed, and an inverter (8) controls the rotational speed of the vacuum pump based on the output from the control part (6).</p> |
