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发明名称
Method and apparatus for loading substrate in semiconductor manufacturing apparatus
摘要
申请公布号
GB0105504(D0)
申请公布日期
2001.04.25
申请号
GB20010005504
申请日期
2001.03.06
申请人
ANELVA CORPORATION
发明人
分类号
C23C14/50;C23C14/56;C23C16/44;H01L21/00;H01L21/203;H01L21/205;H01L21/302;H01L21/68
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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