MICROPOWDER AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide micropowder that can be used for manufacturing a thin film with a good thickness precision. SOLUTION: (1) The micropowder having an average particle size of 0.5-50μm is obtained by subjecting a liquid crystal polyester having a flow starting temperature of≥200°C and≤270°C to mechanical pulverizing. (2) The pulverizing can be followed by thermal processing in an inert gas atmosphere. (3) The thermal processing can be followed by another step of pulverizing. COPYRIGHT: (C)2003,JPO