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发明名称
METHOD AND DEVICE FOR CLEANING SUBSTRATES
摘要
申请公布号
EP1101245(A2)
申请公布日期
2001.05.23
申请号
EP19990934565
申请日期
1999.07.03
申请人
STEAG ELECTRONIC SYSTEMS AG
发明人
MUELLER, UWE;HENSON, DAVID
分类号
B08B3/04;H01L21/00;H01L21/304;(IPC1-7):H01L21/00
主分类号
B08B3/04
代理机构
代理人
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