| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a new optical modulator which is capable of speed matching without having a buffer layer and is superior in coupling loss. <P>SOLUTION: A Mach-Zehnder type optical waveguide 22 is formed on the side of a principal surface 21A of a substrate 21 made of a material having an electrooptic effect, and a coplanar electrode for modulation consisting of a center electrode 24 and earth electrodes 25-1 and 25-2 is formed on the principal surface 21A. The principal surface 21A of the substrate 21 and a base substrate 31 are stuck to each other by a thermoplastic resin, and a rear side 21B of the substrate 21 is subjected to prescribed machine work to make the entire substrate 21 thin. The rear side 21B of the substrate 21 made thin is subjected to laser beam machining or machine work to form a thin part 26. After the base substrate 31 is peeled, a rear side 21B of the substrate 21 and a principal surface 27A of a support substrate 31 having a groove part 26 on the principal surface side are stuck to each other with a thermosetting resin so that the optical waveguide 22 and the thin part 26 may be placed in the groove part 26, thus obtaining an optical modulator 30. <P>COPYRIGHT: (C)2003,JPO</p> |
