APPARATUS FOR PRODUCING ASSEMBLED SUBSTRATE AND METHOD FOR PRODUCING ASSEMBLED SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for producing assembled substrate which allows reduction of defective production of assembled substrates and a method for producing assembled substrate. SOLUTION: The substrate W2 is conveyed into a chamber 20 of a press machine by a conveyance robot 31 which sucks and holds an outer peripheral part of the inner surface of the substrate W2 while jetting gas toward the inner surface thereof and is held by a pressing plate 24a. COPYRIGHT: (C)2003,JPO