| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that a required three-dimensional(3D) structure can not be reconstructed unless it is by projection data with the image strength of the integrated value of a physical quantity, though there is an image reconfiguring method for inversely projecting the image strength as a method for constricting a 3D sample stricture while using TEM images observed in various directions. SOLUTION: In order to reconstruct the boundary from of a sample structure constructed by piling up several kinds of materials, the borderline of the sample structure extracted from the TEM images is inversely projected on a 3D space. An area with possibility for the sample structure to exist is limited an sample form is specified by calculating the product set of areas projected in respective directions. The 3D sample form can be constructed from the TEM images, which can not be regarded as projection data, and the 3D form of a crystalline sample, with which diffraction contrast can be easily mixed, such as semiconductor device can be constructed as well.
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