发明名称 APPARATUS AND METHOD FOR TESTING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a testing device and a testing method by which a function test for a semiconductor device can be performed at high speed and with high precision. SOLUTION: Between an output terminal of the semiconductor device 1 to be a measuring object and the beginning end side of a transmission line 3, a load resistor R1 having a high impedance is inserted. Between the termination side of the transmission line 3 and a signal detector circuit 5 an impedance matching end-of-line resistor R2 is connected, and a high-speed driver 7 for applying a variable termination voltage to the end-of-line resistor R2 is connected. A termination voltage V2 having the same phase as an expectation value signal is applied from the high-speed driver 7 to the end-of-line resistor R2, adjusting the voltage with the outputting timing of the expectation value signal outputted from the semiconductor device 1. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003270299(A) 申请公布日期 2003.09.25
申请号 JP20020068042 申请日期 2002.03.13
申请人 MITSUBISHI ELECTRIC CORP 发明人 NISHIMURA YASUMASA
分类号 G01R31/28;(IPC1-7):G01R31/28 主分类号 G01R31/28
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