发明名称 Thermal type infrared ray imaging device and fabrication method thereof
摘要 A thermal type infrared ray imaging device has a plurality of cells arranged on a substrate each having a photothermal conversion part which converts an infrared ray into heat, and a thermoelectric conversion part which is provided below the photothermal conversion part and which converts the heat generated by the photothermal conversion part into an electric signal, a selection part which selects some cells among the plurality of cells, and an output part which outputs the electric signal generated by the thermoelectric conversion part of the selected cells. The photothermal conversion part includes a first photothermal conversion layer and a second photothermal conversion layer provided over and apart from the first photothermal conversion layer, which converts an infrared ray within a waveband different from the waveband of the first photothermal conversion layer into heat. The thermoelectric conversion part includes a first thermoelectric conversion part which converts the heat generated by the first photothermal conversion layer into the electric signal and a second thermoelectric conversion part which is thermally separated from the first thermoelectric conversion part, and which converts the heat generated by the second photothermal conversion layer into the electric signal.
申请公布号 US2003178565(A1) 申请公布日期 2003.09.25
申请号 US20030393259 申请日期 2003.03.21
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SHIGENAKA KEITARO;MASHIO NAOYA
分类号 G01J1/02;H01L25/00;H01L27/14;H01L27/146;H01L31/028;H04N5/33;H04N5/335;H04N5/369;(IPC1-7):H01L25/00 主分类号 G01J1/02
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