The suppression of a fluctuation of a base line by a temperature control necessary for each constituent apparatus. An aligner has a first control system for setting the temperature of a first liquid, and for circulating the first liquid with a set temperature through at least one object of a projection optical system and a board stage to control the temperature of the object, and a second control for setting the temperature of a second liquid independently of setting by the first control system, and for circulating the second liquid with a set temperature through a reticle stage to control the temperature of the reticle stage. The first and second control systems have different set capabilities in the point of the size of a temperature range in setting a liquid temperature.
