| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical deflector decreased in the crosstalks between the rotating operations corresponding to the respective revolving shafts of a moving plats rotated around two shafts and an electromagnetic actuator. SOLUTION: A deflection mirror element used for the optical deflector comprises a silicon substrate 200, polyimide films 210, metallic films 220, polyimide films 230, metallic films 240, and polyimide films 250 which are laminated on each other. The silicon substrate 200 has a rectangular segment 202 corresponding to the moving plate and a frame-shaped segment 204 corresponding to a support. The polyimide films 210 and 250 include meshed segments 216 and 256 corresponding to elastic members. The metallic films 220 include wiring 162 for driving and the metallic films 240 include wiring 152 for driving. The segment situated on the moving plate of the wiring 152 for driving extends parallel to the first revolving shaft and the segment situated on the moving plate of the wiring 162 for driving extends parallel to the second revolving shaft orthogonal with the first revolving shaft. COPYRIGHT: (C)2003,JPO
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