| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow rate measuring apparatus capable of preventing collision of particles against and sticking of pollutant to a sensor part and capable of stably and precisely measuring air flow rate. <P>SOLUTION: The flow measuring apparatus is provided with a flow channel 3 used to introduce an air to be measured to be circulated, and the sensing part 4 installed inside the flow channel 3 to measure a flow rate of the air to be measured. A diaphragm part 20 used to stop down the flow of the air to be measured flowing near the sensor part 4 is formed on a sidewall inside the flow channel 3 forming the sensor part 4, and a plane part 20a parallel to the surface of the sensing part 4 is formed at the diaphragm part 20 at least on the upstream side from the sensor part 4. <P>COPYRIGHT: (C)2003,JPO</p> |
