发明名称 ARTICLE HOLDERS WITH SENSORS DETECTING A TYPE OF ARTICLE HELD BY THE HOLDER
摘要 An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.
申请公布号 WO03007345(A9) 申请公布日期 2003.09.25
申请号 WO2002US21600 申请日期 2002.07.08
申请人 TRU-SI TECHNOLOGIES, INC. 发明人 KRETZ, FRANK, E.;BERGER, ALEXANDER, J.;CASAROTTI, SEAN, A.
分类号 B25J13/08;B25J19/02;H01L21/00;(IPC1-7):H01L21/00;H01L21/66;B25J9/00;B23Q17/20;G01D5/24 主分类号 B25J13/08
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