发明名称 |
Ultrasonic vibration cutting method and apparatus |
摘要 |
<p>An ultrasonic vibration cutting method comprising mounting and fixing a part to be cut on a mounting table, moving down an ultrasonic vibration rotation unit, stopping the downward movement of the ultrasonic vibration rotation unit when the cutting blade of the ultrasonic vibration rotation unit reaches a position for cutting the part, moving the ultrasonic vibration rotation unit linearly for cutting, and turning and vibrating the cutting blade with ultrasonic waves to cut the part. <IMAGE></p> |
申请公布号 |
EP1022100(B1) |
申请公布日期 |
2003.09.24 |
申请号 |
EP20000101114 |
申请日期 |
2000.01.20 |
申请人 |
ULTEX CORPORATION |
发明人 |
SATO, SHIGERU;ISHII, RYOICHI |
分类号 |
B28D5/02;B26D7/08;H01L21/301;H01L21/304;(IPC1-7):B26D7/08 |
主分类号 |
B28D5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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