发明名称 Ultrasonic vibration cutting method and apparatus
摘要 <p>An ultrasonic vibration cutting method comprising mounting and fixing a part to be cut on a mounting table, moving down an ultrasonic vibration rotation unit, stopping the downward movement of the ultrasonic vibration rotation unit when the cutting blade of the ultrasonic vibration rotation unit reaches a position for cutting the part, moving the ultrasonic vibration rotation unit linearly for cutting, and turning and vibrating the cutting blade with ultrasonic waves to cut the part. &lt;IMAGE&gt;</p>
申请公布号 EP1022100(B1) 申请公布日期 2003.09.24
申请号 EP20000101114 申请日期 2000.01.20
申请人 ULTEX CORPORATION 发明人 SATO, SHIGERU;ISHII, RYOICHI
分类号 B28D5/02;B26D7/08;H01L21/301;H01L21/304;(IPC1-7):B26D7/08 主分类号 B28D5/02
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