| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet-fed substrate washing method which enables the perfect removal of the stain adhering to an alignment marker formed on the end surface of a substrate when the substrate subjected to rubbing treatment is washed after an oriented film is formed on the surface of the substrate from a polymer material such as a polyimide resin, in a manufacturing process for a liquid crystal display device, and a sheet-fed substrate washing apparatus. SOLUTION: An alcohol washing chamber, a brush washing chamber and a pure water washing chamber are provided in order to wash a member for a liquid crystal panel wherein the laminating positioning alignment marker is provided on the non-display region of the substrate. The alcohol washing chamber and the brush washing chamber are made common by a pretreatment, and the brush washing chamber 1 and a washing liquid replacing chamber 2 being the pure water washing chamber is connected to the pretreatment and brush washing chamber 1. COPYRIGHT: (C)2003,JPO
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