| 摘要 |
PROBLEM TO BE SOLVED: To reduce not only the amount of consumption of a detergent and a rinse but also the amount of energy consumption. SOLUTION: A washing head 12 has a plurality of a washing unit 50 and a drying unit 60. An organic matter washing part 52 of the washing unit 50 selectively sprays a first detergent 68 on a substrate 100 at a position to be washed and a reaction product, or the like, is sucked by a first suction port 72. An inorganic matter washing part 54 of the washing unit 50 sprays a second detergent 74 on the portion to be washed of the substrate 100 from which organic matter is removed and a reaction product, or the like, is sucked by a second suction port. A rinse part 56 of the washing unit 50 sprays pure water 82 on the substrate 100 at the position where the inorganic matter is removed and vapor thereof is sucked by a third suction port 88. The drying unit 60 blows off heated air 90 from a hot air blowoff port 61 to dry the substrate 100. A light guide 62 irradiates the washed part of the substrate 100 with ultraviolet rays 92 to decompose the residual organic matter. COPYRIGHT: (C)2003,JPO
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