| 摘要 |
PURPOSE: A semiconductor device test handler is provided to minimize the temperature nonuniformity within a test chamber by forcedly convecting gas locally heated by a heater unit, thereby preventing the fail of semiconductor devices. CONSTITUTION: A tray in which semiconductor device to be tested are seated is loaded in a semiconductor device loader, A semiconductor device handler unit feeds the semiconductor devices to designated places. A temperature measuring unit measures the temperature within a test chamber(352). In the test chamber(352), a gas heating unit(410), a convecting unit(420) for convecting gas heated by the gas heating unit(410) within the test chamber, and a controller comparing the measured temperature and a preset temperature to control the temperature measuring unit and the gas heating unit.
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