发明名称 MANUFACTURING METHOD FOR GLASS SUBSTRATE FOR INFORMATION RECORDING MEDIUM
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a high quality glass substrate for an information recording medium allowing improvement of a degree of cleanliness while maintaining smoothness of a surface of the substrate after polishing it and allowing correspondence to high density recording. <P>SOLUTION: This glass substrate is manufactured in such a way that suspension containing silicon dioxide (SiO<SB>2</SB>) as a main component of particle is used as abrasive, and a washing treatment is applied using washing chemicals after polishing the surface of the substrate to remove foreign matters adhered to the surface of the substrate. The washing chemicals having etching function for a glass material and ion strength which is the sum of molar concentration of all the ions existent in the washing chemicals of 1×10<SP>-5</SP>to 1 mol/L are used as the washing chemicals used in this treatment. Consequently, it is possible to suppress coagulation of particles on the surface of the substrate by use of the washing chemicals and prevent particles from remaining on the surface of the substrate as foreign matters. <P>COPYRIGHT: (C)2003,JPO</p>
申请公布号 JP2003266283(A) 申请公布日期 2003.09.24
申请号 JP20020072235 申请日期 2002.03.15
申请人 NIPPON SHEET GLASS CO LTD 发明人 MITANI KAZUISHI;SAITO YASUHIRO
分类号 B24B57/02;B24B1/00;B24B37/00;G11B5/84;H01L21/304;(IPC1-7):B24B1/00 主分类号 B24B57/02
代理机构 代理人
主权项
地址