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发明名称
摘要
申请公布号	JP3277414(B2)	申请公布日期	2002.04.22
申请号	JP19930210326	申请日期	1993.08.25
申请人		发明人
分类号	C23F4/00;H01L21/28;H01L21/302;H01L21/3065;H01L21/336;H01L29/78;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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