| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrapure water production apparatus which removes traces of fine particles and ionic components contained in ultrapure water supplied to a use point, supplies ultrapure water suitable for the production of a high integration device, or the like, and reduces the replacement frequency of a module. <P>SOLUTION: In the ultrapure water production apparatus for supplying ultrapure water to the use point through piping, the module filled with a porous organic ion exchanger having an open cell structure having meso-pores 1-1,000 μm in average diameter in macro-pores connected to each other and macro-pore walls and a three-dimensional mesh structure in which ion exchange groups are distributed uniformly, and an ion exchange capacity is at least a 0.5 mg equivalent/g dry porous material is set in the piping for supplying the ultrapure water, and the ultrapure water is further treated by the module. <P>COPYRIGHT: (C)2003,JPO |
