| 摘要 |
PROBLEM TO BE SOLVED: To provide the electrostatic drive device in which stationary electrode substrates are disposed respectively at an upper side and a lower side of a movable electrode plate. SOLUTION: By means of a switch SW, the electrostatic drive device switches between an upper shift state of the movable electrode plate 2, obtained in such a way that the movable electrode plate 2 and a lower stationary electrode substrate 8 are rendered at the same potential and a voltage lower than an upper pull-in voltage is applied across the movable electrode plate 2 and an upper electrode plate 3; and a lower shift state of the movable electrode plate 2, obtained in such a way that the movable electrode plate 2 and the upper electrode plate 3 are rendered at the same potential and a voltage lower than a lower pull-in voltage is applied across the movable electrode plate 2 and the lower stationary electrode substrate 8. COPYRIGHT: (C)2003,JPO |
