发明名称 |
Method and apparatus for determining the vectorial distance between the bonding capillary and the image recognition system in a wire bonder |
摘要 |
The bonder has a beam splitter (12) positioned between a light source (11) and an end (15) of a glass fiber (10) for separating light fed into the glass fiber. Another end (16) of the glass fiber serves as a reference point to determine a position of an optical axis of an image recognition system and a position of a tip of a capillary (5). The glass fiber and the beam splitter form a single fiber optic component. An Independent claim is also included for a method of determining a vectorial distance between a tip of capillary and an optical axis of an image recognition system. |
申请公布号 |
EP1346793(A1) |
申请公布日期 |
2003.09.24 |
申请号 |
EP20020006158 |
申请日期 |
2002.03.19 |
申请人 |
ESEC TRADING S.A. |
发明人 |
HESS, PETER;MICHLER, MARKUS;ONDA, NICOLINO |
分类号 |
B23K20/00;H01L21/00 |
主分类号 |
B23K20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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