发明名称 Method and apparatus for determining the vectorial distance between the bonding capillary and the image recognition system in a wire bonder
摘要 The bonder has a beam splitter (12) positioned between a light source (11) and an end (15) of a glass fiber (10) for separating light fed into the glass fiber. Another end (16) of the glass fiber serves as a reference point to determine a position of an optical axis of an image recognition system and a position of a tip of a capillary (5). The glass fiber and the beam splitter form a single fiber optic component. An Independent claim is also included for a method of determining a vectorial distance between a tip of capillary and an optical axis of an image recognition system.
申请公布号 EP1346793(A1) 申请公布日期 2003.09.24
申请号 EP20020006158 申请日期 2002.03.19
申请人 ESEC TRADING S.A. 发明人 HESS, PETER;MICHLER, MARKUS;ONDA, NICOLINO
分类号 B23K20/00;H01L21/00 主分类号 B23K20/00
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