发明名称 C-ACHSENORIENTIERTE DÜNNSCHICHFILME AUS PEROVSKIT, GEWACHSEN AUF SILIZIUMDIOXID
摘要 A method and resulting structure for growing a crystalline perovskite film (16) on a silicon dioxide layer (12) by means of an intermediate template layer (14) of a c-axis oriented layered perovskite, such as bismuth titanate. The perovskite film can be ferroelectric lead-lanthanum zirconate titanate or conductive cubic metal oxides used as electrodes for the ferroelectric.
申请公布号 DE69332028(D1) 申请公布日期 2002.07.18
申请号 DE1993632028 申请日期 1993.10.28
申请人 TELCORDIA TECHNOLOGIES, INC. 发明人 RAMESH, RAMAMOORTHY
分类号 B32B9/00;B32B17/06;C23C14/08;C30B29/32;H01F10/28;H01G4/33;H01G7/06;H01L21/02;H01L21/314;H01L21/8242;H01L21/8246;H01L21/8247;H01L27/105;H01L27/108;H01L27/115;H01L29/788;H01L29/792;H01L39/02;H01L41/22;(IPC1-7):H01L21/316;H01L21/320 主分类号 B32B9/00
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