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发明名称
摘要
申请公布号	JP2003528453(A)	申请公布日期	2003.09.24
申请号	JP20010569553	申请日期	2001.03.22
申请人		发明人
分类号	G03F7/20;H01L21/027;H02K7/08;H02K41/03;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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