| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micro flow passage structure which makes the surface area of porous film larger and to provide a production method thereof. <P>SOLUTION: An aluminum film 23 is formed on the inner wall surface of a micro flow passage 22 which is formed on one surface of a small-sized silicone substrate 21. Therein, when the aluminum film 23 is formed by thermal spraying method, the thickness is made relatively thick. As a result, a porous anodic oxide coating which is somewhat thick is formed on the surface of the aluminum film 23 and catalyst which is rather much is attached on the porous anodic oxide coating which is somewhat thick. <P>COPYRIGHT: (C)2003,JPO |
