SOI/GLASS PROCESS FOR FORMING THIN SILICON MICROMACHINED STRUCTURES,申请号EP20010993334-传众专利搜索

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发明名称	SOI/GLASS PROCESS FOR FORMING THIN SILICON MICROMACHINED STRUCTURES
摘要
申请公布号	EP1345844(A2)	申请公布日期	2003.09.24
申请号	EP20010993334	申请日期	2001.12.20
申请人	HONEYWELL INTERNATIONAL INC.	发明人	CABUZ, CLEOPATRA;RIDLEY, JEFFREY, ALAN
分类号	B81B3/00;B81C1/00;H01L27/12;(IPC1-7):B81C1/00	主分类号	B81B3/00
代理机构		代理人
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地址

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