| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method capable of improving productivity without causing trouble on the surface of a nozzle plate, and a provide manufacturing apparatus therefor. SOLUTION: In the case conveyance of a hoop material 101 is stopped in a plasma polymerization processing part 120, a positioning mechanism 129 is operated so as to position and fix the hoop material 101 such that the hoop material 101 is supported and fixed on a supporting part 128a of a supporting table 128. Then, switching mechanisms 126, 127 are operated for contacting switching members 126c, 127c with the hoop material 101 so as to close introduction openings 121a, 121b. Thereafter, the pressure inside a processing container 121 is reduced by an exhausting system 125. A predetermined processing gas is supplied from a gas supply system 124 to the inside of the processing container 121. A predetermined high frequency electric power is supplied between a discharge electrode 122 and the processing container 121 from an electric power supply system 123 so as to generate plasma between the discharge electrode 122 and the hoop material 101. COPYRIGHT: (C)2003,JPO
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