MARGIN POSITION MEASURING METHOD, INSPECTING METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To resolve the problem of a conventional margin position measuring method in which wrinkles cannot be distinguished and a measurement error is large. SOLUTION: An image of an object to be inspected is picked up by setting a camera at a magnification capable of picking up images of a plurality of margins of the object to be inspected, the picked up image data is stored in a memory, an interval of a straight line is measured from the image data, and it is judged whether the measured interval is a predetermined interval.