Cloth cleaning device and polishing machine

摘要

The cloth cleaning device 30 of a polishing machine 10 is capable of fully cleaning a polishing cloth 12a including a part in the vicinity of a center roller 14. In the cloth cleaning device 30, an arm 22 is moved, in a plane parallel to the polishing cloth 12a, between a first position, which is located above the polishing cloth 12a, and a second position, which is located outside of the polishing cloth 12a. A jet nozzle 31 is attached to the arm 22 and jetting high pressure water 31a toward the polishing cloth 12a. An enclosing member 40 encloses the jet nozzle 31 so as to prevent the high pressure water 31a, which has been jetted out from the jet nozzle 31, from scattering. The jet nozzle 31 is headed toward the center roller 14 and the high pressure water 31a is jetted toward the part of the polishing cloth 12a in the vicinity of the center roller 14 when the arm 22 moves the jet nozzle 31 close to the center roller 14.