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发明名称
FIMS INTERFACE WITHOUT ALIGNMENT PINS
摘要
申请公布号
EP1345828(A1)
申请公布日期
2003.09.24
申请号
EP20010998498
申请日期
2001.11.16
申请人
ASYST TECHNOLOGIES
发明人
ROSENQUIST, FREDERICK, T.
分类号
H01L21/677;(IPC1-7):B65G49/07;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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