发明名称 SHEET CONVEYER FOR CONVEYING SEMICONDUCTOR WAFER AND LIQUID CRYSTAL GLASS SUBSTRATE PROVIDED WITH DEVICE FOR AUTOMATICALLY WASHING PART RETAINING CONVEYED ARTICLE
摘要 PROBLEM TO BE SOLVED: To always and automatically washing off various kind of minute pieces adhering on a retaining material of a conveyer without stopping operation of the conveyer. SOLUTION: Since a washer 10 operates in connection with movement of fingers 4 and automatically washes only open fingers 4, washing can be done without stopping operation of the conveyer while running the conveyer 10. A method of washing can be selected from a method of spraying gas or liquid, a method by ultrasonic wave and a method by grinding according to a type of a process. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003267549(A) 申请公布日期 2003.09.25
申请号 JP20020112685 申请日期 2002.03.12
申请人 HAYASHI TAKEHIDE 发明人 HAYASHI TAKEHIDE
分类号 B08B3/08;B08B3/12;B65G45/10;B65G45/22;B65G49/07;H01L21/677;H01L21/68;(IPC1-7):B65G49/07 主分类号 B08B3/08
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