MANUFACTURING METHOD FOR INERT ULTRAPURE WATER AND MANUFACTURING APPARATUS THEREFOR

摘要

PROBLEM TO BE SOLVED: To obtain inert ultrapure water. SOLUTION: A manufacturing method for the inert ultrapure water has a process for bringing a mixture of an ozone gas and ultrapure water irradiated with ultraviolet rays into contact with a platinum molded object and a process for subjecting the mixture to ozone removing treatment. COPYRIGHT: (C)2003,JPO