| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional machining device capable of achieving simplicity of structure, compactness, high speed, high acceleration and deceleration, and high precision free from backlash. SOLUTION: In this three-dimensional machining device, a spindle head 4 having a tool and a table 8 for placement of a workpiece are relatively movable in the Z-axis direction as the vertical direction, and in the X-axis direction and the Y-axis direction perpendicular to the Z-axis direction and to each other. It is provided with a Z-axis drive means 3 to relatively move the spindle head 4 and the table 8 in the Z-axis direction, and an X-axis drive means 5 and a Y-axis drive means 7 to relatively move the spindle head 4 and the table 8 in the X-axis direction and the Y-axis direction. The Z-axis drive means 3 is composed of a ball screw feed mechanism. The X-axis drive means 5 and the Y-axis drive means 7 are composed of a linear motor mechanism 42. COPYRIGHT: (C)2003,JPO
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