| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vacuum chuck capable of preventing destruction of a circuit due to peeling off electrification. <P>SOLUTION: This vacuum chuck 1 is composed of a pad 3 in which a suction face 2 for mounting and dismounting a workpiece W is formed in a part of an upper end, a ring 5 for holding the pad 3 and forming a vacuum space 4, a mounting screw 6, and an intermediate plate 7 for supporting the pad 3 on its spherical face. It is attached to a robot hand. When a material of the workpiece W is glass, the suction face 2 is formed by coating SiO<SB>2</SB>having close order of electrification sequence to that of glass in a plane part 32 of a top part protruding slightly from an upper end face 31 of the pad 3. Consequently, it is possible to reduce an amount of peeling off electrification generated in the workpiece when mounting and dismounting the suction face from the workpiece and prevent destruction of the circuit of the workpiece because the suction face is made of the material having close order of electrification sequence to that of the workpiece. <P>COPYRIGHT: (C)2003,JPO</p> |
