发明名称 Die attach back grinding
摘要 An apparatus for constructing a number of integrated circuits from a single substrate is provided by the present invention. A number of integrated circuits are constructed on the single substrate. The individual integrated circuits are then separated by cutting the substrate with a dicing saw. A vacuum chuck is used to grasp the individual integrated circuits while a back grinding process is performed on the individual circuits to polish the circuits to a predetermined thickness. The integrated circuits are then placed into integrated circuit packages. By performing the back grinding process after the substrate has been divided into the separate individual circuits, the present invention eliminates the need to back grind portions of the substrate that are not further used, and tends to eliminate handling of the fragile thinned substrate.
申请公布号 US6624048(B1) 申请公布日期 2003.09.23
申请号 US20010005097 申请日期 2001.12.05
申请人 LSI LOGIC CORPORATION 发明人 MADGE ROBERT
分类号 B24B1/00;B24B7/22;B24B37/04;H01L21/00;H01L21/304;H01L21/78;(IPC1-7):H01L21/46 主分类号 B24B1/00
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