发明名称 |
Method and apparatus for physical image based inspection system |
摘要 |
A method is described that involves accepting a mask design file input and then simulating the inspection of a mask through an optical channel. The mask design file has patterns. The optical channel corresponds to a mask inspection tool optical channel. The mask is patterned according to the mask design file patterns.
|
申请公布号 |
US6625800(B1) |
申请公布日期 |
2003.09.23 |
申请号 |
US19990476318 |
申请日期 |
1999.12.30 |
申请人 |
INTEL CORPORATION |
发明人 |
QIAN QI-DE;TEJNIL EDITA;DAO GIANG |
分类号 |
G01N21/956;G03F1/00;(IPC1-7):G06F17/50 |
主分类号 |
G01N21/956 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|