发明名称 Electromechanical device and a process of preparing same
摘要 An electromechanical device having a size no larger than about 10 microns utilizing a working fluid in the high pressure liquid or supercritical fluid state. A process of preparing the electromechanical device involves the introduction of the liquid or supercritical fluid therein which permits the retention of the working fluid in the liquid or supercritical state after introduction.
申请公布号 US6622507(B2) 申请公布日期 2003.09.23
申请号 US20010971515 申请日期 2001.07.26
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 COTTE JOHN MICHAEL;MCCULLOUGH KENNETH JOHN;MOREAU WAYNE MARTIN;SIMONS JOHN P.;TAFT CHARLES J.;VOLANT RICHARD P.
分类号 F15B21/06;F15C5/00;F16K99/00;(IPC1-7):F25D23/12 主分类号 F15B21/06
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