发明名称 |
Substrate coated with an MGO-layer |
摘要 |
A method and apparatus for producing a substrate which is coated with a Mgo-layer, includes a pair of Mg targets which define a slit and which have a target purity of at least 99 percent. A working gas flows along the slit. Oxygen is provided in an area between the slit and the substrate to be coated. The temperature of the substrate is set by heating or cooling the substrate during the coating process.
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申请公布号 |
US6623607(B1) |
申请公布日期 |
2003.09.23 |
申请号 |
US19970985880 |
申请日期 |
1997.12.05 |
申请人 |
BALZERS HOCHVAKUUM AG |
发明人 |
STOLLENWERK JOHANNES;DAUBE CHRISTOPH;GUERKE ACHIM |
分类号 |
C03C17/245;C23C14/00;C23C14/08;(IPC1-7):C23C14/34 |
主分类号 |
C03C17/245 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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