Prober and low-temperature test equipment having same incorporated therein

摘要

A prober capable of enhancing accuracy of a test intended. The prober includes prober needles arranged so as to be kept contacted with a laminate formed by laminating thermal transfer regulating members on each other and provided on a probe card. Such arrangement of the laminate restrains heat of the probe card from being transmitted through the probe needles to devices on a semiconductor wafer which is a specimen to be tested.