发明名称 |
Method and apparatus for plasma treating a chemical species |
摘要 |
A method of treating a first chemical species in a gas using a plasma, the method including the steps of providing an array of micro-scale cavity discharge devices capable of sustaining the plasma where the first chemical species is capable of flowing proximate to the array of micro-scale cavity discharge devices, wherein the first chemical species is converted to a second chemical species within the plasma.
|
申请公布号 |
US6624583(B1) |
申请公布日期 |
2003.09.23 |
申请号 |
US20020185627 |
申请日期 |
2002.06.28 |
申请人 |
MOTOROLA, INC. |
发明人 |
COLL BERNARD F.;VONALLMEN PAUL A.;ZENHAUSERN FREDERIC |
分类号 |
B01D53/32;(IPC1-7):H01J7/24 |
主分类号 |
B01D53/32 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|