发明名称 Method of manufacturing a transducer having a diaphragm with a predetermined tension
摘要 A method of manufacturing a transducer of the type having a diaphragm (11) with a predetermined tension. After the transducer has been manufactured with its basic structure the diaphragm is adjusted to have a predetermined tension, which is preferably low in order to obtain a high sensitivity. Two embodiments are disclosed. One embodiment includes heating the transducer to a temperature above the glass transition temperature of the material (12, 14) retaining the diaphragm. Another embodiment includes measuring the actual tension of the diaphragm, which can be used to calculate an adjustment of the thickness of the diaphragm resulting in the desired tension.
申请公布号 US6622368(B1) 申请公布日期 2003.09.23
申请号 US20010719208 申请日期 2001.01.05
申请人 SONIONMEMS A/S 发明人 MUELLENBORN MATTHIAS;ROMBACH PIRMIN
分类号 H04R19/04;H04R31/00;(IPC1-7):H04R31/00 主分类号 H04R19/04
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