Illumination device for a DUV microscope and DUV microscope

摘要

An illumination device for a DUV microscope has an illumination beam path, proceeding from a DUV light source in which are arranged a condenser and a reflection filter system which generates a DUV wavelength band and comprises four reflection filters. At these, the illumination beam is reflected in each case at the same reflection angle alpha, the illumination beam path extending coaxially in front of and behind the reflection filter system. According to the present invention, the reflection angle alpha=30° and the DUV wavelength band lambdDUV+Deltalambd has a half-value width of max. 20 nm and a peak with a maximum value S of more than 90% of the incoming light intensity. The resulting very narrow half-value width of the DUV wavelength band makes it possible for the DUV objectives of the DUV microscope to be very well-corrected.