发明名称 Nonvolatile semiconductor memory device having ferroelectric capacitors
摘要 A memory cell array is constructed by a plurality of sub-arrays which include a plurality of sub-word lines, a plurality of bit lines, a plurality of plate lines and a plurality of memory cell blocks, plural ones of the sub-arrays being arranged in the sub-word line direction, a plurality of sub-row decoders provided between the plurality of respective sub-arrays, for driving the sub-word lines, a main row decoder disposed on one-end side of the plurality of sub-arrays in the sub-word line direction, and a plurality of main-block selecting lines for respectively supplying outputs of the main row decoder to the sub-row decoders. The main-block selecting lines for connecting the main row decoder to the sub-row decoders are formed of the same interconnection layer as the plate lines and metal interconnections used between the memory cells in the cell block.
申请公布号 US6625053(B2) 申请公布日期 2003.09.23
申请号 US20020279910 申请日期 2002.10.25
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TAKASHIMA DAISABURO
分类号 G11C14/00;G11C11/22;H01L21/8246;H01L27/105;(IPC1-7):G11C5/08;G11C11/42;G11C8/00 主分类号 G11C14/00
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