Method for manufacturing perpendicular magnetic recording head

摘要

In a method for manufacturing a perpendicular magnetic recording head, a groove defined by the inner side surfaces of a first nonmagnetic layer and the top surface of a main magnetic pole layer is formed using the difference in etching rates for dry etching between the main magnetic pole layer and the first nonmagnetic layer. An auxiliary magnetic pole layer is formed on the groove with a nonmagnetic material layer disposed therebetween. A projection integrated with the auxiliary magnetic pole layer is formed in a recess of the nonmagnetic material layer on the groove. This projection extends toward the main magnetic pole layer.