Method of observation by transmission electron microscopy

摘要

A method for observing defect in an amorphous material by transmission electron microscopy is disclosed. The method comprises the steps of: incident electron beam into the amorphous material; eliminating a generated diffraction wave to form an image only by a transmission wave coming through the amorphous material; and observing the image under an under-focus condition. A method for respectively observing an amorphous material and a crystalline material in a composite material containing both of the amorphous material and the crystalline material by transmission electron microscopy is also disclosed. when observing a defect in the amorphous material, electron beam is injected into the amorphous material, and a generated diffraction wave is eliminated, then an image is formed only by a transmission wave coming through the amorphous material to conduct observation thereof under an under-focus condition, while when observing the crystalline material, electron beam is injected into the crystalline material, and an image is formed by a generated diffraction wave and by a transmission wave coming through the crystalline material to conduct observation thereof.