发明名称
摘要 <p>PROBLEM TO BE SOLVED: To achieve the simplification of a test process and the reduction of testing cost. SOLUTION: The burn-in test of a semiconductor element is performed in such a state that the projected electrodes 12 of the test substrate 10 and the electrical connection electrode 3a of a semiconductor element 3 are bonded under heating and pressure and, when the semiconductor element 3 is peeled from the test substrate 10 after the test of the semiconductor element 3 is completed, the projected electrodes 12 are peeled from the test substrate 10 along with the semiconductor element 3 and the projected electrodes 12 are formed on the semiconductor element 3 to simultaneously perform the test of the semiconductor element 3 and the formation of the projected electrodes 12 to the semiconductor element 3.</p>
申请公布号 JP3449997(B2) 申请公布日期 2003.09.22
申请号 JP20010208391 申请日期 2001.07.09
申请人 发明人
分类号 G01R31/26;G01R1/073;H01L21/60;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
代理机构 代理人
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